Semiconductor Processing Equipment

Ceramics are widely used in semiconductor processing equipment where wiring is becoming finer and more multilayered. For lithography equipment, lightweight ceramics with high rigidity are expanding. For etching and deposition equipment, in addition to ceramics with plasma resistance and low particle count, ceramics with heat resistance and low dielectric loss are expanding. For wafer transfer arms, ceramics with high precision and excellent mechanical properties are adopted. Sapphire is used for windows, wafer carrier plates, wafer contact lift pins, plasma introduction tubes, etc. that require optical transparency.