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Sapphire Handling Arms (End Effectors)
Superior heat resistance and plasma resistance are ideal for semiconductor processing equipment.
Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.
- Property :
- Heat Resistance
- Plasma Resistance
- Low Dielectric Loss
Product Data
| Material | Single-Crystal Sapphire |
|---|---|
| Precision | Standard Tolerance (mm, nominal dimension: a) 1>a :±0.05 1≦a≦4 :±0.1 4<a≦25 :±0.2 25<a≦102 :±0.25 102<a≦190 :±0.5 190<a :±1 |
Applications
- Wafer Transportation
