Ceramic Materials
Aluminum Nitride (AlN)
A material with high thermal conductivity and electrical insulation
Aluminum nitride has high thermal conductivity and electrical insulation, and is used in heat dissipating and soaking components such as parts for semiconductor manufacturing equipment.
- Important property :
- Thermal Conductivity
- Wear Resistance
Property
Product examples
-
Heaters for Semiconductor Processing EquipmentHigh-performance heaters utilize high thermal conductivity and plasma resistance.- High Thermal Conductivity
- Plasma Resistance
-
Electrostatic Chucks (ESCs)Highly plasma-resistant chucks perform well in a wide range of operating temperatures.- Plasma Resistance
Ceramic Materials
- AluminaAl2O3
- Single-Crystal SapphireAl2O3
- ZirconiaZrO2
- Silicon NitrideSi3N4
- Silicon CarbideSiC
- Zirconia Toughened AluminaZTA
- Cordierite2MgO･2Al2O3･5SiO2
- CermetTiC,TiN
- YttriaY2O3
- Single-Crystal YAGY3Al5O12
- YAG-dispersed AluminaAl2O3
- Aluminum NitrideAlN
- Silicon-Infiltrated Silicon CarbideSiSiC
- Porous Ceramics
Customizable
We have a wide range of technologies such as material technology, process technology, design technology, measurement/evaluation technology, and integrated processes from materials to products in-house, so we can respond to various customizations. Please feel free to contact us first.
