Ceramic Materials
Cordierite (2MgO·2Al2O3·5SiO2)
A material with an extremely low coefficient of thermal expansion and little dimensional change due to temperature changes
Cordierite has a very small coefficient of linear thermal expansion and has a higher specific rigidity than glass-based materials. Taking advantage of these characteristics, it is used for structural parts in semiconductor processing equipment. It is also used as a mirror due to its high surface smoothness. In the field of astronomy and aerospace, it is applied to light observation in various wavelengths and for optical communication. It is also used as an optical system by assembling multiple cordierite components.
- Important property :
- Coefficient of Thermal Expansion
- Heat Shock Resistance
Property
Product examples
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Low Thermal Expansion Ceramic MirrorsHighly rigid and extremely thin with reduced weight.- High Specific Rigidity
- Low Thermal Expansion
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Vacuum Chucks, Integrated Mirrors for Stages, Stage PartsHigh-precision vacuum chucks with various surface profiles/patterns for diverse operating conditions.- High Stiffness
- High-Precision
Ceramic Materials
- AluminaAl2O3
- Single-Crystal SapphireAl2O3
- ZirconiaZrO2
- Silicon NitrideSi3N4
- Silicon CarbideSiC
- Zirconia Toughened AluminaZTA
- Cordierite2MgO･2Al2O3･5SiO2
- CermetTiC,TiN
- YttriaY2O3
- Single-Crystal YAGY3Al5O12
- YAG-dispersed AluminaAl2O3
- Aluminum NitrideAlN
- Silicon-Infiltrated Silicon CarbideSiSiC
- Porous Ceramics
Customizable
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