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Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts
High-precision vacuum chucks with various surface profiles/patterns for diverse operating conditions.
Our ceramic vacuum chucks, made with intricate, high-precision surface profiles and patterns, are used for various processes such as wafer holding and transporting.
- Property :
- High Stiffness
- High-Precision
- Low Thermal Expansion
Product Data
| Material | Alumina, Silicon Carbide, Porous Materials, Cordierite |
|---|---|
| Shape | Intricate surface profiles / patterns available. |
| Size | For φ200/300mm equipment |
| Precision | Accuracy of Mirror face: λ/20 or less Reflection Rate: 95% or higher |
| Special process | PVD / CVD Coating, Mirror Coating , Bonding Technology |
Applications
- Wafer Holding / Transportation
