Ceramic Materials
Yttria (Y2O3)
A material with excellent corrosion resistance in a plasma environment
Yttria is a material with excellent plasma resistance. It is effective in reducing contamination by particles and impurities, which is desired for parts in manufacturing processes that use plasma such as semiconductor processing equipment.
- Important property :
- Plasma Resistance
- Corrosion Resistance
Property
Product examples
Ceramic Materials
- AluminaAl2O3
- Single-Crystal SapphireAl2O3
- ZirconiaZrO2
- Silicon NitrideSi3N4
- Silicon CarbideSiC
- Zirconia Toughened AluminaZTA
- Cordierite2MgO･2Al2O3･5SiO2
- CermetTiC,TiN
- YttriaY2O3
- Single-Crystal YAGY3Al5O12
- YAG-dispersed AluminaAl2O3
- Aluminum NitrideAlN
- Silicon-Infiltrated Silicon CarbideSiSiC
- Porous Ceramics
Customizable
We have a wide range of technologies such as material technology, process technology, design technology, measurement/evaluation technology, and integrated processes from materials to products in-house, so we can respond to various customizations. Please feel free to contact us first.
