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Anti-Plasma Materials
Kyocera's plasma-resistant materials help create the next generation of etching technology.
Next-generation etching technology will require more robust and reliable materials which can address concerns such as plasma corrosion, particle generation, metal contamination, and oxygen disassociation. Kyocera offers anti-plasma materials which are ideal for this next generation of etching technology.
- Property :
- Plasma Resistance
- Low Dielectric Loss
Product Data
Applications
- Chamber Parts
