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Domes, Chambers
High-purity materials with high durability offer reliable plasma resistance.
We supply ceramic chambers and domes with excellent plasma resistance, which provide equipment performance suitable for 300mm wafers.
- Property :
- Uniform Electrical Properties
- Plasma Resistance
Product Data
| Material | Alumina |
|---|---|
| Shape | Complicated shapes available |
| Size | For φ200/300mm equipment |
Applications
- Chamber Parts
