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Ceramic Materials

Alumina(Al₂O₃)

Single-Crystal Sapphire(Al₂O₃)

Zirconia(ZrO₂)

Silicon Nitride(Si₃N₄)

Silicon Carbide(SiC)

Zirconia Toughened Alumina(ZTA)

Cordierite(2MgO･2Al₂O₃･5SiO₂)

Cermet(TiC,TiN)

Yttria(Y₂O₃)

Single-Crystal YAG(Y₃Al₅O₁₂)

YAG-dispersed Alumina

Aluminum Nitride(AlN)

Silicon-Infiltrated Silicon Carbide(SiSiC)

Porous Ceramics

Material Characteristics Table

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Hardness(Wear Resistance)

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Ceramic Materials

YAG-dispersed Alumina

A material with strength equivalent to alumina and higher plasma resistance than alumina

YAG-Dispersed Alumina is a material with improved plasma resistance by dispersing yttria and other materials within it. It also has the similar strength as alumina, so there's less risk when handling parts.
*YAG:Y₃Al₅O₁₂(Yttrium/Aluminium/Garnet)

Important property :: Plasma Resistance; Strength

Property

The values are typical material properties and may vary according to products configuration and manufacturing process.
＊1: All values for apparent density and bulk density are the same, except for the porous materials which lists apparent density only.

Material Characteristics Table

Product examples

Anti-Plasma Materials

Kyocera's plasma-resistant materials help create the next generation of etching technology.
- Plasma Resistance
- Low Dielectric Loss

Ceramic Materials

Material Characteristics Table

Customizable

We have a wide range of technologies such as material technology, process technology, design technology, measurement/evaluation technology, and integrated processes from materials to products in-house, so we can respond to various customizations. Please feel free to contact us first.

Ceramic Materials