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Handling Arms
Heat-resistant, non-damaging handling arms provide high functionality.
A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
- Property :
- Heat Resistance
Product Data
| Material | Alumina, Silicon Carbide |
|---|---|
| Size | For φ200/300mm equipment |
| Special process | DLC Coating |
Applications
- Wafer Transportation
