Fine Ceramics(Advanced Ceramics)
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Feedthroughs (Coaxial)

Used in a wide range of applications, from radiation light sources and nuclear science to industrial equipment.
気密端子(同軸端子)

Kyocera offers a wide variety of feedthrough connectors, based on our ceramic-to-metal bonding technology and many years of experience in ultra-high vacuum fields, including radiation light source and aerospace. These open tool products meet the specifications of standard coaxial connectors and multi-pin connectors. They are used in a wide range of applications from cutting-edge technology and science, such as radiation nuclear fusion research, to industrial machines such as semiconductor processing equipment.

Property :
Airtightness
Bonding Technology

Product Data

Material Metallized Ceramics
Airtightness 1.3 × 10-10 Pa·m3/s
Temp Min. Temp.:-196℃ Max. Temp.:450℃
Note that these numbers are meant as reference only and are based on our basic evaluation and set criteria. The numbers may vary depending on the product’s usage.

Features

Product types

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Grounded Shield

Conventional vacuum feedthrough

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Floating Shield

It has a construction that is less susceptible to the influences of the surrounding environment (noise, etc.) due to the complete separation of the terminal part from the attachment part of the flange, etc.

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Applications

  • Semiconductor Processing Equipment
  • Feedthroughs for Scientific Equipment
  • Industrial Manufacturing Equipment

Related Industries & Products

Related Case Studies & Solution Technologies