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Polishing Plates
High-purity alumina ceramics are used for excellent rigidity and wear resistance.
High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; maintains good surface shape over a long period of time.
- Property :
- High Hardness
- Wear Resistance
- Chemical Resistance
Product Data
| Material | Alumina |
|---|---|
| Shape | Convex, flat and concave available. |
| Size | MAXφ40" |
| Precision | Flatness: 1μm or less |
Applications
- Wafer Polishing
