Single-crystal sapphire is a transparent ceramic material with high hardness, strength, rigidity, wear resistance, heat resistance, and plasma resistance, in addition to outstanding optical transparency. Processing single-crystal sapphire is extremely difficult and requires a high level of processing technology.
Over 50-plus years in of processing expertise, Kyocera has accumulated expertise in optical-level lapping and polishing for sapphire wafer shapes, complex shapes (such as rings), grooves, uneven surfaces, spheres, and curved surfaces.
Features
- Capable of Lapping and Polishing Complex Shaped Sapphire Products
Lapping and polishing possible for various shapes, such as rings, grooves, uneven surfaces, spheres, and curved surfaces. - Lapped and Polished Surfaces are Smooth
Outstanding optical transmittance is possible by surface roughness of Ra ≤ 0.05 μm - Low Particulates
High-precision surface finishing reduces particle generation (dust generation).
Application Examples
Due to their superior material properties, single-crystal sapphire parts are being used more frequently in applications with harsh environments, such as semiconductor manufacturing equipment, automobile/mobility, industrial machinery, and aerospace/astronomy.
Kyocera can manufacture from large diameter and long sapphire materials and single-crystal sapphire that does not fluoresce under lasers.
We also have extensive experience mirror polishing complex shaped products, including large single-crystal sapphire rings.
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Plasma Tube
Φ30 × φ25 × 250L (mm)
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Sensor Window
Φ5 × φ3 × 70L (mm)
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Cylinder
Φ100 × φ80 × 150L (mm)
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Sensor Lens
Φ50 × 30H (mm) hollow
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Guide Rail
Groove: 5 (width) x 3 (depth) x 10L (mm)
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Gas and Fluid Nozzles
Flow channel diameter: φ4 × 50L (mm)
*Above numbers are processing examples
Design Guide
| Standard Specifications | ||
|---|---|---|
| Material | Single-Crystal Sapphire | |
| Material Code | SA100 | |
| Full Length | （L） | - 500 [mm] |
| Outer Diameter | （ΦD） | 5.0 - 100.0 [mm] |
| Inner Diameter | （Φｄ） | 2.0 - 80.0 [mm] |
*Refer to the following figures for dimensions in parentheses.
Lapping and Polishing Evaluation
We develop single-crystal sapphire with outstanding optical transmittance by improving the level of lapping and polishing of the finished surface.
Surface Roughness
Observation image of finished surface by a laser microscope
Observation
Image
(x1,200)
*Characteristics vary depending on orientation and thickness
Transmittance
Visible light transmittance of lapped and polished complex surface and optical polished surface measured by a spectrophotometer
*Without AR coating
*Characteristics vary depending on orientation and thickness
Property Data Comparison
Comparison of main properties of single-crystal sapphire and transparent materials
| Material Material Code |
Sapphire SA100 |
Quartz Glass | Glass | |||
|---|---|---|---|---|---|---|
| Melting Point | ℃ | 2053 | 1600 | 720 | ||
| Vickers Hardness HV9.807N | GPa | 22.5 | 8.8 | 5.4 | ||
| Flexural Strength (3-Point Bending) | MPa | 690 | 68.6 | 49.0 | ||
| Young's Modules | GPa | 470 | 73 | 72 | ||
| Thermal Conductivity | 20℃ | W/(m・K) | 42 | 1.2 | 0.8 | |
| C.T.E. | 40-400℃ | × 10-6/K | Parallel to the C-axis | 7.7 | 0.51 (RT -100℃) |
8.5 |
| Perpendicular to C-axis | 7.0 | |||||
Plasma Resistance
Single-crystal sapphire has outstanding plasma resistance.
It suppresses particle generation (dust generation) and is effective in reducing contamination by impurities.
For these reasons, single-crystal sapphire is used for windows and parts of sputtering equipment, CVD equipment, and etching equipment.
Corrosion resistance test of single-crystal sapphire and quartz glass
Etching Rate
Measurement Condition
| Size : | φ150mm |
| Reactant Gas : | Chlorine Trifluoride (CIF3) |
| Time : | 270 hours |
Corrosion resistance test results
*State after one month of use under reactant gas
Measurement Condition
| Reactant gas : | Mixed gas of tetrafluoromethane (CF4) + oxygen(O2) |
| Time : | 1 month |
Are you looking for materials with high hardness or high wear resistance to replace quartz glass? Kyocera develops single-crystal sapphire for harsh environments, such as astronomy, aerospace, and chemical handling. We also help decrease maintenance costs and increase the lifespan for replacement parts.
Contact us for a free consultation with one of our product solution experts.
Values are based on typical material properties and
may vary according to product configuration and manufacturing process.