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Ceramic Wafer Boat (Wafer Carrier)
Alumina wafer boats offer excellent heat, wear, and chemical resistance.
Wafer boats maximize performance in wafer heat treatment and deposition (batch processing) processes. The main material, high-purity alumina, exhibits excellent resistance and durability against heat, chemicals, and wear of the wafer contact area that occurs during the process. Supporting diverse customer needs, you can choose additional optimal Fine Ceramic materials such as silicon carbide or sapphire.
Furthermore, because a segmented structure is created, only worn or damaged parts need to be replaced. This contributes to reducing operating costs.
- Property :
- Heat Resistance
- Wear Resistance
- Chemical Resistance
Product Data
| Material | Alumina（Purity 99.0% or higher） |
|---|---|
| Other Materials | Silicon Carbide（SC120O）、Sapphire（SA100） |
Features
- High Heat Resistance
- High Wear Resistance
- High Chemical Resistance
- Due to the segmented design, only worn parts can be replaced (each part is fixed with ceramic bolts).
- Low Thermal Expansion
- Customizable Design
Applications
- Wafer Batch Processing Fixture
*Image is for illustration purposes only.
