Ceramic Packages

Ceramic Packages for MEMS Microphones

MEMS_MIC

Demand for MEMS (Micro Electro Mechanical System) microphones is rising as these devices expand into new applications, such as smartphones, tablets, wearable devices, wireless headsets, and smart speakers. Kyocera provides ceramic packages in thin designs that enhance microphone sensitivity and enable further miniaturization.

Features

Higher rigidity and strength
Higher Rigidity and Strength
Thinner, miniaturized packages
Thinner, Miniaturized Packages

Material Properties: CTE and Young's Modulus

Ceramic exhibits a coefficient of thermal expansion (CTE) close to that of silicon, and a relatively high modulus of elasticity (Young's modulus). Together, these properties help minimize deformation to enhance the sensitivity of microphone elements.

Material Material Number CTE (ppm/K) Young's modulus (GPa)
Alumina (Al2O3) A440 7.1 (RT~400℃) 310
[reference] Glass epoxy substrate (FR-4) 14~16 23
[reference] Semiconductor device (Si) 3~4
*Representative values shown above may vary depending on the specific material/process and other factors.
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Miniaturization and Thinner Packages

Miniaturization and Thinner Packages

Ceramic's high rigidity reduces the deformation of the MEMS device, allowing the microphone to maintain high sensitivity even when mounted on a very thin substrate. In addition, compared to FR-4 composite material, ceramic packages can have thinner walls and thinner bottom layers, which facilitates miniaturization.

Water Resistant / Dust Resistant Concepts

Kyocera's unique microfabrication technology can allow smaller through-holes to enhance the water- and dust-resistance of MEMS microphones. Please contact us for details.

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