Ceramic Packages

Ceramic Substrates for Plasma Generation

Ceramic Substrates for Plasma Generation

Plasma is used in a wide range of fields, including electrical equipment, medicine, physics, chemistry, and manufacturing.
Kyocera has developed a plasma generation substrate utilizing multilayer ceramic package technology. Internal wiring within the substrate's layers enables the generation of low-voltage, high-output plasma while maintaining the strength of the entire substrate.

Features

Enables the generation of a low-voltage, high-output plasma while maintaining the strength of the ceramic substrate

Features

To generate high-power plasma at low voltage, the dielectric layer (ceramic layer) must be thinned. However, if the dielectric layer is made thinner, its strength decreases and it breaks more easily.
The wiring of Kyocera's plasma generation substrate is embedded within ceramic layers, so the overall strength of the substrate is not compromised even as the ceramic layers, which affect operating characteristics, are thinned. This enables low-voltage, high-output plasma to be realized while maintaining substrate strength.



Examples of Plasma Generation Substrates

Parallel Flat Type
Comb-Pattern Type
honeycomb_pattern_type

Diverse Applications for Plasma Generating Substrate

Plasma is expected to be used in a wide range of applications, including electrical equipment, environmental and medical fields, physics and chemistry fields, and manufacturing.

Potential Plasma Applications

Potential Plasma Applications

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