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KYOCERA Develops Silicon MEMS Resonator Production Technology

Kyocera’s proprietary technology achieves outstanding frequency temperature coefficient and ESR characteristics, accelerating high-value-added timing device business

February 13, 2020Japan

Kyocera Corporation (President: Hideo Tanimoto) announced that it has successfully developed a proprietary technology to produce silicon MEMS resonators for the silicon MEMS market. Following Kyocera's July 2019 acquisition of 100% of the shares of Tikitin Oy, a Finnish venture company possessing advanced MEMS technology, and the subsequent establishment of Kyocera Tikitin Oy, the company has achieved outstanding frequency temperature coefficient and ESR characteristics*1 never previously attained with conventional quartz and silicon products.

Timing devices that generate stable frequencies at regular intervals are essential for the control and operation of electronic circuits. Driven in part by widespread adoption of IoT and wearable devices, as well as the acceleration of ADAS and EV technologies, the timing device market is expected to expand to 4.5 billion U.S. dollars by around 2030. Because demand is rising rapidly for timing devices that are smaller, lower-profile, higher-frequency, and superior with regard to temperature resistance, silicon MEMS resonators that meet these requirements will become widely used.

Kyocera will begin mass producing high-value-added silicon MEMS resonators in 2021, and will continue its technological development to address demand for further miniaturization, lower profile, and higher frequency, thereby advancing the field of high-added-value timing devices.

General Specifications and Production Facility
External dimensions 1.0 x 0.8 mm
Frequency 24 MHz and others
ESR 60 ohm or less
Operation temperature range -40℃ to 150 ℃
Frequency temperature coefficient +/- 25ppm
Production facility Yamagata Higashine Plant

Main Features
1. Outstanding Frequency Temperature Coefficient
Outstanding Frequency Temperature Coefficient
                        
As temperature rises, the frequency tolerance of conventional silicon becomes a straight line with a downward slope — and that of crystal becomes a cubic curve. Kyocera's silicon MEMS resonators achieve a narrow ± 25 ppm tolerance over a wide temperature range (-40℃ to 150℃) using proprietary doping technology.
2. Miniaturization
Miniaturization
                    
In the case of 24 MHz products, ESR characteristics are generally required to be 60ohm or less, and the 1.6 × 1.2 mm crystal size was considered the limit for miniaturization due to these physical properties. Kyocera's silicon MEMS resonator achieves the required characteristics in an area just 1.0 × 0.8 mm, a 58% reduction, using original element design technology.
*1 Low equivalent series resistance (ESR) makes it easier to generate a stable clock signal.

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