By Material

About Yttria

Its excellent plasma resistance is ideal for applications in semiconductor processing equipment, where particle contamination must be avoided. It contributes to productivity improvement due by reducing equipment maintenance requirements.

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(Shown in alphabetical order)

  • Photo
  • Product name / Item description
  • Features
  • Applications
  • Link
PHOTO: Link to Link to Anti-Plasma Materials

Anti-Plasma Materials

Excellent plasma resistance increases the lifetime of parts.
  • Plasma Resistance
  • Low Dielectric Loss
  • Process Chamber Parts
more
KYOCERA provides support right from the material selection stage.

Please discuss your requirements such as conditions, shape and size, precision and budget with us. We will suggest the best materials and manufacturing methods from our extensive range to answer your needs.

  • PHOTO: Link to Inquiries
  • PHOTO: Link to Global Contact
  • KYOCERA Fine Ceramic Components at Hannover Messe
  • Fine Ceramic Solutions