Ceramic Packages for MEMS Sensors

Kyocera offers hermetic ceramic packages with superior mechanical properties, suitable for small, high density, and surface mountable applications - including accelerometers and angular rate, pressure, optical and RF sensors.

Features

Air-cavity type hermetic package
Close thermal-expansion matching provides superior mechanical elasticity and less mechanical stress with silicon MEMS chips
Miniaturized, high-density surface mountable package incorporating multi-layer ceramic technology

Applications

Accelerometers
Angular rate sensors (gyro sensors, yaw-rate sensors)
Pressure sensors
CMOS / CCD Image sensors

Packages for MEMS (Micro Electro-Mechanical Systems)

Ceramic Packages for MEMS Gyroscopes and Accelerometers
(Copyright. Analog Devices, Inc. All Rights Reserved.)

Ceramic MCM Package for Accelerometer
(Courtesy of Colibrys S.A.)

DLP^® Chip Package
(Courtesy of Texas Instruments, Inc.)

iMEMS is a registered trademark of Analog Devices, Inc.
DLP is a registered trademark of Texas Instruments, Inc.

Structure

TYPE 1: Package + Seal RING
TYPE 2: Package + Seal META (or NON)
Cerdip Type Package

Material Characteristics

			Alumina
Items		Units	A440	A443
Bulk Density		-	3.6	3.7
Electrical	Dielectric Constant (1MHz)	-	9.8	9.6

	tan delta (1MHz)	( 1 X 10E-4)	24	5.0

	Volume Resistivity (20°C)	Ω-cm	>10¹²	>10¹²
Thermal	Thermal Expansion (40-400°C)	( 1 X 10E-6/°C)	7.1	6.9
	Thermal Conductivity	W/mK	14.0	18
	Specific Heat	J/gK	0.78	0.79
Mechanical	Flexural Strength	MPa	400	460
Mechanical	Young's Modulus	GPa	310	310
Conductor	Material		W	W
	Sheet Resistance	mΩ/SQ	8	8
	Tensile Strength	Kgf/mm2SQ	4	4
Characteristic				High strength
Color of Ceramics			Brown/Black	Brown/Black

Reliability Test Results (Tested as package only)

Test Items	Test Conditions	Hermeticities (Gross Leak only)	opens/shorts	Conductive Resistance	Insulation Resistance
Temp. cycle	-65 to +150°C	1000 cycles	1000 cycles	1000 cycles	1000 cycles
High Temp. Torage	+150°C	1000 hours	1000 hours	1000 hours	1000 hours
High Temp. Humidity	85°C - 85%RH	1000 hours	1000 hours	1000 hours	1000 hours
Thermal Shock	-65 to +150°C	1000 cycles	1000 cycles	1000 cycles	1000 cycles
High Temp. Storage with Bias	150°C/5.5V	1000 hours	N/A	3000 hours	N/A

For reference purposes only

Organic Packages