Anti-Plasma Materials
Kyocera's plasma-resistant materials help create the next generation of etching technology.Next-generation etching technology will require more robust and reliable materials which can address concerns such as plasma corrosion, particle generation, metal contamination, and oxygen disassociation. Kyocera offers anti-plasma materials which are ideal for this next generation of etching technology.
Property
Plasma Resistance
Low Dielectric Loss
Product specs
- Material
- Yttria, Alumina
- Shape
- Complicated shapes available
- Size
- For φ200/300mm equipment
Applications
- Chamber Parts