Anti-Plasma Materials

PHOTO: Anti-Plasma Materials

Kyocera's plasma-resistant materials help create the next generation of etching technology.

Next-generation etching technology will require more robust and reliable materials which can address concerns such as plasma corrosion, particle generation, metal contamination, and oxygen disassociation. Kyocera offers anti-plasma materials which are ideal for this next generation of etching technology.

Features

  • Plasma Resistance
  • Low Dielectric Loss
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
Inquiries
  • Product specs

Product specs

Material Yttria, Alumina
Shape Complicated shapes available
Size For φ200/300mm equipment
Download catalog

Ceramic Components for Semiconductor Processing(PDF/3.0MB)PDF