Anti-Plasma MaterialsKyocera's plasma-resistant materials help create the next generation of etching technology.
Next-generation etching technology will require more robust and reliable materials which can address concerns such as plasma corrosion, particle generation, metal contamination, and oxygen disassociation. Kyocera offers anti-plasma materials which are ideal for this next generation of etching technology.
- Yttria, Alumina
- Complicated shapes available
- For φ200/300mm equipment
- Chamber Parts