By Application

Semiconductor / LCD Processing Equipment

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PHOTO: Link to Link to Anti-Plasma Materials

Anti-Plasma Materials

Excellent plasma resistance increases the lifetime of parts.
  • Plasma Resistance
  • Low Dielectric Loss
  • Process Chamber Parts
more
PHOTO: Link to Link to Domes, Chambers

Domes, Chambers

High purity and excellent plasma resistance increases the lifetime of parts.
  • Plasma Resistance
  • Uniform Electrical Properties
  • Chamber Parts
more
PHOTO: Link to Link to Electrostatic Chucks (ESCs)

Electrostatic Chucks (ESCs)

High purity, excellent plasma resistance and de-chucking response suitable for a wide range of temperatures.
  • Plasma Resistance
  • Wafer Holding
  • Flatness Correction
  • Cooling
more
PHOTO: Link to Link to Handling Arms

Handling Arms

Vacuum adsorption chucking type; various coatings are available.
  • High Heat Resistance
  • Wafer Transportation
more
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