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| Kyocera offers hermetic ceramic packages with superior mechanical properties, suitable for small, high density, and surface mountable applications - including accelerometers and angular rate, pressure, optical and RF sensors. |
| Product Outline |
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Air-cavity type hermetic package |
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Close thermal-expansion matching provides superior mechanical elasticity and less mechanical stress with silicon MEMS chips |
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Miniaturized, high-density surface mountable package incorporating multi-layer ceramic technology |
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Accelerometers |
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Angular rate sensors (gyro sensors, yaw-rate sensors) |
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Pressure sensors |
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CMOS/CCD Image sensors |
| Products and Applications |
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Packages for MEMS (Micro Electro-Mechanical Systems) |
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| Product Specifications |
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| TYPE 1: Package + Seal RING |
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TYPE 2: Package + Seal META (or NON) |
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| Material Characteristics and Reliability |
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Material Characteristics |
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Alumina |
| Items |
Units |
A440 |
A443K |
| Bulk Density |
- |
3.6 |
3.7 |
| Electrical |
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Dielectric Constant (1MHz) |
- |
9.8 |
9.6 |
| Dielectric Constant (10GHz) |
- |
9.8 |
- |
| tan delta (1MHz) |
( 1 X 10-4) |
24 |
5.0 |
| tan delta (10GHz) |
( 1 X 10-4) |
- |
- |
| Volume Resistivity (20°C) |
-cm |
>1012 |
>1012 |
| Thermal |
1/°C |
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Thermal Expansion (40-400°C) |
( 1 X 10-6/°C) |
7.1 |
6.9 |
| Thermal Conductivity |
W/mK |
14.0 |
18 |
| Specific Heat |
J/gK |
0.78 |
0.79 |
| Mechanical |
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Flexural Strength |
MPa |
400 |
460 |
| Young's Modulus |
GPa |
310 |
310 |
| Conductor |
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Material |
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W |
W |
| Sheet Resistance |
m /SQ |
8 |
8 |
| Tensile Strength |
Kgf/mm2SQ |
4 |
4 |
| Characteristic |
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High strength |
| Color of Ceramics |
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Brown/Black |
Brown/Black |
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Reliability Test Results |
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| (Tested as package only) |
| Test Items |
Test Conditions |
Hermeticities
(Gross Leak only) |
opens/shorts |
Conductive Resistances |
Conductive Resistances |
| Temp. cycle |
-65 to +150°C |
1000 cycles |
1000 cycles |
1000 cycles |
1000 cycles |
| High Temp. Torage |
+150°C |
1000hours |
1000hours |
1000hours |
1000hours |
| High Temp. Humidity |
85°C -
85%RH |
1000hours |
1000hours |
1000hours |
1000hours |
| Thermal Shock |
-65 to +150°C |
1000 cycles |
1000 cycles |
1000 cycles |
1000 cycles |
| High Temp. Storage with Bias |
150°C/5.5V |
1000hours |
N/A |
3000hours |
N/A |
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| For reference purpose only. |
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