Handling Arms

PHOTO: Handling Arms

Heat-resistant, non-damaging handling arms provide high functionality.

A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.

Features

  • High Heat Resistance
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
Inquiries
  • Product specs

Product specs

Material Alumina, Silicon Carbide
Size For φ200/300mm equipment
Special process DLC Coating
Download catalog

Ceramic Components for Semiconductor Processing(PDF/3.0MB)PDF