Vacuum Chucks, Integrated Mirrors for Stages, Stage PartsHigh-precision vacuum chucks with various surface profiles/patterns for diverse operating conditions.
Our ceramic vacuum chucks, made with intricate, high-precision surface profiles and patterns, are used for various processes such as wafer holding and transporting.
High Specific Rigidity High-Precision Low Thermal Expansion
- Alumina, Silicon Carbide, Cordierite and Porous Materials
- Intricate surface profiles / patterns available.
- For φ200/300mm equipment
- Accuracy of Mirror face: λ/20 or less Reflection Rate: 95% or higher
- Special process
- PVD / CVD Coating, Mirror Coating , Bonding Technology
- Wafer Holding