Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts

PHOTO: Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts

High-precision vacuum chucks with various surface profiles / patterns for diverse operating conditions.

Our ceramic vacuum chucks, made with intricate, high-precision surface profiles and patterns, are used for various processes such as wafer holding and transporting.


  • High Precision
  • Low Thermal Expansion
  • High Specific Rigidity
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
  • Product specs

Product specs

Material Alumina, Silicon Carbide, Cordierite and Porous Materials
Shape Intricate surface profiles / patterns available.
Size For φ200/300mm equipment
Precision Accuracy of Mirror face: λ/20 or less
Reflection Rate: 95% or higher
Special process PVD / CVD Coating, Mirror Coating , Bonding Technology
Download catalog

Ceramic Components for Semiconductor Processing(PDF/3.0MB)PDF