Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts
High-precision vacuum chucks with various surface profiles/patterns for diverse operating conditions.Our ceramic vacuum chucks, made with intricate, high-precision surface profiles and patterns, are used for various processes such as wafer holding and transporting.
Property
High Specific Rigidity
High-Precision
Low Thermal Expansion
Product specs
- Material
- Alumina, Silicon Carbide, Cordierite and Porous Materials
- Shape
- Intricate surface profiles / patterns available.
- Size
- For φ200/300mm equipment
- Precision
- Accuracy of Mirror face: λ/20 or less Reflection Rate: 95% or higher
- Special process
- PVD / CVD Coating, Mirror Coating , Bonding Technology
Applications
- Wafer Holding / Transportation