Heat Dissipation Structure Ceramic Substrates

Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts

High-precision vacuum chucks with various surface profiles/patterns for diverse operating conditions.

Our ceramic vacuum chucks, made with intricate, high-precision surface profiles and patterns, are used for various processes such as wafer holding and transporting.

Property

High Specific Rigidity High-Precision Low Thermal Expansion

Product specs

Material
Alumina, Silicon Carbide, Cordierite and Porous Materials
Shape
Intricate surface profiles / patterns available.
Size
For φ200/300mm equipment
Precision
Accuracy of Mirror face: λ/20 or less
Reflection Rate: 95% or higher
Special process
PVD / CVD Coating, Mirror Coating , Bonding Technology

Applications

  • Wafer Holding
  • Transportation

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