Domes, Chambers

PHOTO: Domes, Chambers

High-purity materials with high durability offer reliable plasma resistance.

We supply ceramic chambers and domes with excellent plasma resistance, which provide equipment performance suitable for 300mm wafers.

Features

  • Plasma Resistance
  • Uniform Electrical Properties
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
Inquiries
  • Product specs

Product specs

Material Alumina
Shape Complicated shapes available
Size For φ200/300mm equipment
Download catalog

Ceramic Components for Semiconductor Processing(PDF/3.0MB)PDF