Polishing Plates
High-purity alumina ceramics are used for excellent rigidity and wear resistance.High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; maintains good surface shape over a long period of time.
Property
Wear Resistance
High Stiffness
Chemical Resistance
Product specs
- Material
- Alumina
- Shape
- Convex, flat and concave available.
- Size
- MAXφ40"
- Precision
- Flatness: 1μm or less
Applications
- Wafer Polishing