Polishing PlatesHigh-purity alumina ceramics are used for excellent rigidity and wear resistance.
High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; maintains good surface shape over a long period of time.
Wear Resistance High Stiffness Chemical Resistance
- Convex, flat and concave available.
- Flatness: 1μm or less
- Wafer Polishing