Polishing Plates

PHOTO: Polishing Plates

High purity alumina ceramics are used for excellent rigidity and wear-resistance.

High-purity alumina ceramic features outstanding rigidity and excellent wear-resistance for wafer polishing; maintains good surface shape over a long period of time.


  • High Stiffness
  • Wear Resistance
  • Chemical Resistance
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
  • Product specs

Product specs

Material Alumina
Shape Convex, flat and concave available.
Size MAXφ40"
Precision Flatness: 1μm or less
Download catalog

Ceramic Components for Semiconductor Processing(PDF/2MB)PDF