Plasma Generation, Introduction Tubes, Microwave Introduction Tubes

PHOTO: Plasma Generation, Introduction Tubes, Microwave Introduction Tubes

Tube-shaped parts exhibit superior plasma resistance and low dielectric loss.

Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools. It may also be used in microwave introduction tubes for its characteristic low dielectric loss.

Features

  • Plasma Resistance
  • Heat Resistance
  • Low Dielectric Loss
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
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  • Product specs

Product specs

Material Single-Crystal Sapphire
Precision Standard Tolerance (mm, nominal dimension: a)
1>a :±0.05
1≦a≦4 :±0.1
4<a≦25 :±0.2
25<a≦102 :±0.25
102<a≦190 :±0.5
190<a :±1
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Single-Crystal Sapphire(PDF/1.5MB)PDF