Plasma Generation, Introduction Tubes, Microwave Introduction TubesTube-shaped parts exhibit superior plasma resistance and low dielectric loss.
Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools. It may also be used in microwave introduction tubes for its characteristic low dielectric loss.
- Single-Crystal Sapphire
- Standard Tolerance (mm, nominal dimension: a)
1＞a : ±0.05 1≦a≦4 : ±0.1 4＜a≦25 : ±0.2 25＜a≦102 : ±0.25 102＜a≦190 : ±0.5 190＜a : ±1
- Plasma Generation
- Introduction Tubes
- Microwave Introduction Tubes