Wafer Boats
Semiconductor processing equipment utilizes sapphire's plasma- and heat-resistant properties.Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.
Property
Heat Resistance
Plasma Resistance
Low Dielectric Loss
Product specs
- Material
- Single-Crystal Sapphire
- Precision
- Standard Tolerance (mm, nominal dimension: a)
1＞a : ±0.05 1≦a≦4 : ±0.1 4＜a≦25 : ±0.2 25＜a≦102 : ±0.25 102＜a≦190 : ±0.5 190＜a : ±1
Applications
- Tools