Wafer Boats

PHOTO: Wafer Boats

Semiconductor processing equipment utilizes sapphire's plasma- and heat-resistant properties.

Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.

Features

  • Plasma Resistance
  • Heat Resistance
  • Low Dielectric Loss
We support custom products from prototypes to mass-production runs. Please contact us to explore options, even if your specifications are different from those shown on our Web site.
Inquiries
  • Product specs

Product specs

Material Single-Crystal Sapphire
Precision Standard Tolerance (mm, nominal dimension: a)
1>a :±0.05
1≦a≦4 :±0.1
4<a≦25 :±0.2
25<a≦102 :±0.25
102<a≦190 :±0.5
190<a :±1
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Single-Crystal Sapphire(PDF/1.5MB)PDF