Wafer BoatsSemiconductor processing equipment utilizes sapphire's plasma- and heat-resistant properties.
Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.
- Single-Crystal Sapphire
- Standard Tolerance (mm, nominal dimension: a)
1＞a : ±0.05 1≦a≦4 : ±0.1 4＜a≦25 : ±0.2 25＜a≦102 : ±0.25 102＜a≦190 : ±0.5 190＜a : ±1