Heat Dissipation Structure Ceramic Substrates

Low Thermal Expansion Ceramic Mirrors

Highly rigid and extremely thin with reduced weight.

- By utilizing dense cordierite with a low thermal expansion coefficient, deformation due to temperature change is suppressed.
- Due to the thin shape enabled by the high rigidity, and the complicated rib structures, weight can be reduced to approximately 1/3 compared with low thermal expansion glasses (based on Kyocera simulation).
- These materials offer excellent machinability yielding higher productivity for complicated shapes as well as shorter production times.

Property

High Specific Rigidity Low Thermal Expansion

Product specs

Material
Cordierite
Special process
Weight reduction is possible by utilizing rib structures.

Features

Deflection depth compared with low thermal expansion glass

Deflection depth when supported by three points: Low thermal expansion glass vs. Ceramics Conditions for investigation
- Product size: φ1020 × 120mm (Rib structure)
- Supported position: Three points at the circumference
- Load : Own weight only

Physical properties compared with low thermal expansion glass

Temperature dependence graph

Applications

  • Mirrors for telescopes
  • Mirrors for semiconductor processing equipment
  • Mirrors for three-dimensional measuring machines

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