The adhesive-free Sapphire monolithic bonding maintains superior sapphire properties such as plasma resistance, chemical resistance, heat resistance and mechanical strength even under a severe environment with plasma or exposed chemicals. In addition, it can be used where transparency is required, as the bonding boundary is not visible.
Plasma Generating Tube
(Size: Φ100mm)Flow Cells
(Size: 30×25mm)Side
A-A'
BondingCompared to Quartz and Alumina, Sapphire has superior chemical resistance.
1 x 1 x 0.02 (inches)
Sapphire piece immersed for 6 days
HCl | :35% 20℃ |
HNO3 | :50% 20℃ |
HF | :46% 60℃ |
HF/HNO3 | :40/10% 60℃ |
H3PO4 | :60% 100℃ |
H2SO4 | :95% 95℃ |
NaOH | :30% 100℃ |
High durability under both fluorine-based gas and chlorine-based gas plasma environment. *Measured on polished surfaces
Apparatus | Magnetron type RIE Equipment |
Pressure | 25mTorr |
Gas flow rate | 50sccm |
RF output | 600W |
Magnetic force | 150gauss |
Vdc | 210V |
Time | 1 hour |
Apparatus | Magnetron type RIE Equipment |
Pressure | 25mTorr |
Gas flow rate | 50sccm |
RF output | 600W |
Magnetic force | 150gauss |
Vdc | 270V |
Time | 1 hour |
Sapphire has consistent transmittance over a wide wavelength range.
Sapphire and Alumina have high bonding strength and can be used where hermeticity is required. In addition, since no adhesive is used, the generation of impurities and particles is reduced around the bonded area. It is possible to use Sapphire and Alumina bonded parts, instead of all Sapphire parts, where transparency is required. Sapphire portion can be applied where transparency is required.
Measuring Window in Biochemical Analyzer
Values are based on typical material properties and
may vary according to product configuration and manufacturing process.