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PHOTO: Link to Link to Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts

Vacuum Chucks, Integrated Mirrors for Stages, Stage Parts

Transportation parts with high purity and excellent chemical resistance. Various surface shapes available for diverse operational conditions.
  • High Precision
  • Low Thermal Expansion
  • High Specific Rigidity
  • Wafer Holding
  • Transportation
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  • PHOTO: Link to Inquiries
  • PHOTO: Link to Global Contact
  • Fine Ceramic Solutions
  • Special Feature