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Semiconductor / LCD Processing Equipment

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PHOTO: Link to Link to Polishing Plates

Polishing Plates

High rigidity and chemical resistance maintain surface shape over long periods of time.
  • High Stiffness
  • Wear Resistance
  • Chemical Resistance
  • Wafer Polishing
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PHOTO: Link to Link to SiC (Silicon Carbide) Polishing Plates

SiC (Silicon Carbide) Polishing Plates

Polishing plate with higher thermal conductivity and lower thermal expansion.
  • High Thermal Conductivity
  • Low Thermal Expansion
  • High Stiffness

Other property

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PHOTO: Link to Link to Dressing Plates for Polishing Pads

Dressing Plates for Polishing Pads

Excellent anti-wear properties with optional microspikes.
  • Long Lifetime (Wear-resistance)Hv=5000
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PHOTO: Link to Link to Handling Arms

Handling Arms

Vacuum adsorption chucking type; various coatings are available.
  • High Heat Resistance
  • Wafer Transportation
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We possess innovative and wide-ranging technologies which can provide customer solutions.

We welcome customized product requests.

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