| Ultrasonic
Motor Direct Drives |
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In the semiconductor manufacturing process an XY Stage with high accuracy is required for EB Lithography. The high accuracy of Kyocera's XY Stage is achieved by using high purity alumina material, which provides rigidity and a low thermal expansion coefficient, in combination with an ultrasonic linear motor for the drive system. Other applications include wafer inspection, ion beam defect correction, and scanning electron microscopes.
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Ceramics Components for Semiconductor Processing
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| Wafer
Polishing Plates |
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High purity alumina wafer polishing plates provide excellent flatness control over a long period of time. The ceramic material advantages include excellent wear-resistance, high rigidity, and superior flatness retention in comparison to metals. The ceramic plates are available with a flatness spec of less than 1 micron and in sizes ranging from 12" to 40".
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Ceramics Components for Semiconductor Processing
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| SiC
Polishing Plates |
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Silicon Carbide polishing plates for single wafer processing feature the advantages of high thermal conductivity, low thermal expansion, high rigidity, excellent thermal uniformity, superior wear-resistance, high corrosion-resistance, and superior flatness retention compared to metals. The plates are available with a concave, flat, or convex surface in sizes up to 12" in diameter.
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Ceramics Components for Semiconductor Processing
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| Plasma
Proof Series (Anti-Plasma Materials) |
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In the next generation of plasma etching technology, problems such as erosion, particle contamination, and the dissociation of oxygen can occur. Kyocera offers anti-plasma materials which are suitable for the next generation of etching technology.
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Ceramics Components for Semiconductor Processing
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| LCD
Manufacturing Equipment Parts |
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As the size of Liquid Crystal Displays (LCDs) increase, and the manufacturing precision becomes even more critical, larger and higher accuracy manufacturing equipment will be required. Kyocera produces large-size ceramic parts made of various fine ceramic materials of high strength and high purity.
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Ceramics Components for Semiconductor Processing
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| Vacuum
Chucks |
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Kyocera's Ceramic Vacuum Chucks are manufactured with high accuracy and complex surface shapes, which are used for holding wafers during various semiconductor processes.
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Ceramics Components for Semiconductor Processing
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| Electro-Static
Chucks |
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Kyocera's Electro-Static Chucks are used in a wide range of low and high temperature semiconductor processes. They feature excellent thermal conductivity and uniformity, high chucking force regardless of thickness, a high dielectric constant, and superior wear-resistance. The chucks are available in aluminum nitride, alumina and sapphire.
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Ceramics Components for Semiconductor Processing
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| High
Purity AlN Ceramic Heaters |
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Kyocera's Aluminum Nitride (AlN) Heaters, used in semiconductor processing, feature excellent thermal uniformity, rapid heat-up, easy temperature control, excellent plasma durability, and low contamination. The purity of the material used to manufacture the heater is greater than 99.9%.
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Ceramics Components for Semiconductor Processing
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| Handling Arms |
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Kyocera produces handling arms with high heat-resistance. In applications where there is a need to reduce damage or particle contamination of the wafer, Kyocera can also apply a coating, such as Diamond Like Carbon (DLC), on the surface of the ceramics.
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Ceramics Components for Semiconductor Processing
(pdf/1,924KB) |
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| Single
Crystal Sapphire |
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The demand for single crystal sapphire has been expanding rapidly due to its superior electrical and mechanical properties, chemical stability, and light transmission. Kyocera mass produces single crystal sapphire using proprietary methods, which capture the advantages of crystal orientation control and the flexibility of configuration in cross sections.
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| Metallized Products |
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Kyocera's Metallized Products are used in various applications such as semiconductor processing equipment, vacuum switches, surge arrestors, magnetron parts, medical components, and analytical equipment. Kyocera can braze various metals to a host of fine ceramic materials. Flanges can then be welded on for attachment of the ceramic assembly to other equipment.
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| Related Information |
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| If you cannot open the linked PDF files with Acrobat Reader, please install the above Adobe Japanese Font Pack. |
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Japan
