Handling Arms
Heat-resistant, non-damaging handling arms provide high functionality.A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
Property
Heat Resistance
Product specs
- Material
- Alumina, Silicon Carbide
- Size
- For φ200/300mm equipment
- Special process
- DLC Coating
Applications
- Wafer Transportation