Plasma Generation, Introduction Tubes, Microwave Introduction Tubes
Tube-shaped parts exhibit superior plasma resistance and low dielectric loss.Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools. It may also be used in microwave introduction tubes for its characteristic low dielectric loss.
Property
Heat Resistance
Plasma Resistance
Low Dielectric Loss
Product specs
- Material
- Single-Crystal Sapphire
- Precision
- Standard Tolerance (mm, nominal dimension: a)
1＞a : ±0.05 1≦a≦4 : ±0.1 4＜a≦25 : ±0.2 25＜a≦102 : ±0.25 102＜a≦190 : ±0.5 190＜a : ±1
Applications
- Plasma Generation
- Introduction Tubes
- Microwave Introduction Tubes