Heat Dissipation Structure Ceramic Substrates

Wafer Boats

Semiconductor processing equipment utilizes sapphire's plasma- and heat-resistant properties.

Kyocera's sapphire material, featuring extremely high purity (up to 99.99%), excellent plasma resistance and heat resistance, and restricted particle occurrence, is used in semiconductor processing equipment parts, including structural components and tools.

Property

Heat Resistance Plasma Resistance Low Dielectric Loss

Product specs

Material
Single-Crystal Sapphire
Precision
Standard Tolerance (mm, nominal dimension: a)
1>a : ±0.05
1≦a≦4 : ±0.1
4<a≦25 : ±0.2
25<a≦102 : ±0.25
102<a≦190 : ±0.5
190<a : ±1

Applications

  • Tools

Related information

Download catalog / technical data

Search